PIEZOELECTRIC THIN FILM ELEMENT, METHOD OF MANUFACTURING PIEZOELECTRIC THIN FILM ELEMENT, INK JET HEAD, AND INK JET TYPE RECORDING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric thin film element which has stable quality and yield in a process of forming a device using the piezoelectric thin film element by increasing adhesiveness between an electrode and the piezoelectric thin film, without impairing the piezoelectric performance of the piezoelectric thin film element.;SOLUTION: The piezoelectric thin film element 15 has the piezoelectric thin film 14, which includes a layer (first piezoelectric thin film 14a) formed of a polycrystal having a plurality of crystal orientations along the film thickness and a layer (second piezoelectric thin film 14b) formed of a polycrystal having a single crystal orientation.;COPYRIGHT: (C)2009,JPO&INPIT