Piezoelectric thin film and method for preparation thereof, and piezoelectric element having the piezoelectric thin film, ink-jet head using the piezoelectric element, and ink-jet recording device having the ink-jet head

摘要

A piezoelectric thin film that can obtain a large piezoelectric displacement. The chemical composition of the piezoelectric thin film is represented by _{Pb 1 + a (Zr x Ti} 1-x) O 3 + a ( single, 0.2 ≤a ≤0.6, 0.50 ≤x ≤0.62 ). The crystal structure of the piezoelectric thin film is a member sweep oxygen ions, titanium ions, with an ion defect lacks a part of the zirconium ion perovskite-type columnar crystal region 24 and a non-ionic defect perovskite-type columnar crystal It comprises a mixture of an area (25). According to the configuration of the piezoelectric thin film, since by that the ion deficient perovskite-type columnar crystal region 24 can be relieve residual compressive stress in the crystal, it is possible to obtain a piezoelectric displacement (amount of displacement) of a large piezoelectric element it becomes.