METHOD FOR FORMING FLAT INDIUM TIN OXIDE LAYER ON SUBSTRATE, SUBSTRATE COATING AND ORGANIC LIGHT EMITTING DIODE OF INDIUM TIN OXIDE

摘要

PROBLEM TO BE SOLVED: To enable to generate a flat metal oxide layer, especially a flat ITO layer on a substrate in a simple and economical mode.;SOLUTION: In order to especially form an organic light emitting diode, in a method for forming the ITO layer on the substrate, a part of a thickness of the ITO layer is firstly given by a sputter-deposition at a controlled temperature profile in such a mode that formation of a crystal nucleus may be prevented. After that, the partially coated substrate is heated up to a higher temperature than the recrystallization temperature of the ITO layer, and the remaining part of the ITO layer is sputter-deposited.;COPYRIGHT: (C)2005,JPO&NCIPI