METHOD FOR PRODUCING SMOOTH INDIUM-TIN-OXIDE LAYERS ON SUBSTRATES, A SUBSTRATE COATING OF INDIUM-TIN-OXIDE AND ORGANIC LIGHT-EMITTING DIODE

摘要

The present invention for the production of the organic light emitting diode , onto the substrate ITO (Indium Tin Oxide: indium tin a method for manufacturing an oxide ) layer , forming a first portion of the ITO layer thickness by sputter deposition in the temperature profile is controlled to prevent the formation of crystallization nuclei, followed by re-crystallization temperature of the ITO layer over the portion coated substrate heated to a temperature and thereafter to sputter deposition of the ITO layer, the rest .