PLASMA DENSITY INFORMATION MEASURING PROBE, PLASMA DENSITY INFORMATION MEASURING DEVICE, AND PLASMA PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To obtain plasma density more precisely by improving measuring precision of an absorption frequency by the plasma.;SOLUTION: On a measuring probe to be inserted into a plasma PM, an external conductor 43c of a coaxial cable 43 inserted into a tube 41 which is an dielectrics is grounded at the outside of a chamber 10, and a circular noise reduction element (ferrite core) 50 is passed through the coaxial cable 43 between its grounded site 49 and an antenna 42. By this, noise components picked up by the antenna 42 and transferred through the coaxial cable 43 are reduced, and an S/N ratio of a reflective power signal generated by the plasma PM as an object to be measured can be improved.;COPYRIGHT: (C)2005,JPO&NCIPI