LITHIUM NIOBATE PIEZOELECTRIC SINGLE CRYSTAL, PIEZOELECTRIC VIBRATOR USING THE SAME AND PIEZOELECTRIC VIBRATING GYRO

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric single crystal which is unlikely to be affected by a support structure for fixing a piezoelectric vibrator and a piezoelectric vibrator using it, and to provide a piezoelectric vibrating gyro.;SOLUTION: A piezoelectric single crystal, doped with zinc in the range of ≤5 mol% to lithium niobate, is used for the piezoelectric vibrator, and this piezoelectric vibrator is used for the piezoelectric vibrating gyro. By doping zinc, variations in the electro-mechanical coupling coefficient (k) and the mechanical quality coefficient Qm due to the support mechanism of the piezoelectric vibrator are reduced, the size is reduced, and mass productivity of the piezoelectric vibrator and the piezoelectric gyro can be improved.;COPYRIGHT: (C)2005,JPO&NCIPI