MODELING METHOD OF ESD PROTECTION ELEMENT, AND ESD SIMULATION METHOD

摘要

PPROBLEM TO BE SOLVED: To provide a modeling method of an ESD protection element which can predict characteristic changes in an ESD protection element, a broken place by ESD or tolerance to ESD, even if the manufacturing process is changed. PSOLUTION: In the modeling method of the ESD protection element, electrical characteristic of the ESD protective element is modeled for simulating a circuit including the ESD protection element. The modeling method of the ESD protective element comprises a parameter setting step 114 for setting parameters of one or two or more specific elements which affect electrical characteristic of the ESD protective element and a modelling step 116 which models electrical characteristic of the ESD protective element by the parameter of the specific element. According to such a constitution, characteristic changes in the ESD protection element can be readily predicted, even if the process is changed. PCOPYRIGHT: (C)2005,JPO&NCIPI