Surface element distribution analyzer and surface element distribution analysis method using the same.

摘要

PROBLEM TO BE SOLVED: To provide convenient method and apparatus for measuring the in- plane distribution of element of an object with high spatial resolution and high sensitivity in a photoelectron spectroscopic analyzer. SOLUTION: A photoelectron spectroscopic analyzer is provided with a function for imparting the plane of a measuring sample with a horizontal potential gradient, and a function for varying the direction of potential gradient to the rotational direction in the plane of the sample in order to measure respective photoelectron spectra in response to variation of the potential gradient direction to the rotational direction. From a photoelectron spectrum group measured in response to variation of the potential gradient direction, element distribution is determined by calculation processing based on the principle of reconfiguration from projection.