The three-dimensional stress distributions in the area surrounding indentation pattern for three different materials, Al2O3, Si3N4 and SiC were analyzed by finite element method(FEM). Those theoretical results were also compared with the experimental ones by Rockwell hardness test. The effect of loading stress on the plastic deformation in specimens, surface was investigated on the assumption of shear strain energy theory by Huber-Mises when the materials were indented. The distributions of nomal stress, shear stress, and Mises stress were analysed with variations of loading conditions. It is clear that the analytical results for the stress distributions, the crack length and its density of probability are in good agreement with the experimental results.
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