Method and apparatus for performing a quantitative spatially resolved local and distributional analysis of chemical elements and in situ characterization of the ablated surface regions

摘要

The invention relates to a device with which both a quantitative spatially resolved nanolocal and distributional analysis of elemental concentrations of a sample, as well as a microscopic detection of the surface topography in the nanometer range of the same sample can be performed. To do this, the sample is placed on a slide in a laser ablation chamber and placed on a scanning stage of a laser-assisted microdissection system (LMD). A portion of the sample is selected for examination using a magnifying lens of the LMD. The objective is removed without altering the xy position of the sample, the defocused laser beam of the LMD is amplified near the laser irradiated selected surface of the sample at a metal tip in the near field with the metal tip near the Spots of the focused on the surface of the sample laser beam is positioned by a not coupled with the LMD position device. Part of the sample is ablated and analyzed by ICP-MS. The topography of the sample surface is detected before and / or after the laser ablation using the same metal tip as part of the AFM.