Method and apparatus for carrying out a quantitative spatially resolved locally - and distribution analysis of chemical elements,, and in - situ characterization of the ablated surface regions

摘要

Laser ablation chamber, comprising a container with a to - and abführunsgleitung for a transport gas, a cover glass holder with a for laser light permeable cover glass, which at the same time is suitable for receiving a sample, as well as a means for a gas-tight connection of the deck glass holder and container.