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Versatile method and system for single mode VCSELs

机译:单模VCSEL的通用方法和系统

摘要

A system and method for providing a single mode VCSEL (vertical cavity surface emitting laser) component (100) is disclosed, comprising a semiconductor substrate (102) having a lower surface and an upper surface, a bottom electrical contact (104) disposed along the lower surface of the substrate, a lower mirror (106) formed of n-type material and disposed upon the upper surface of the substrate, an active region (108) having a plurality of quantum wells disposed upon the lower mirror portion, an upper mirror (110) formed from isotropic material and disposed upon the active region, an equipotential layer (112) disposed upon the upper mirror portion, a first upper electrical contact (120) disposed upon the equipotential layer, a second upper electrical contact (122) disposed upon the equipotential layer at a particular distance (124) from the first upper electrical contact, a first isolation region (126) disposed beneath the first upper contact and traversing the equipotential layer, the upper mirror, the active region, and the lower mirror, a second isolation region (128) disposed beneath the second upper contact and traversing the equipotential layer, the upper mirror, the active region, and the lower mirror, and an insulating layer (114, 116) interposed between the upper mirror and the equipotential layer and adapted to form therebetween an aperture (118) of smaller dimension than the particular distance between the first and second upper contacts.
机译:公开了一种用于提供单模VCSEL(垂直腔表面发射激光器)组件( 100 )的系统和方法,该系统和方法包括具有下表面的半导体衬底( 102 )和上表面,沿基板下表面设置的底部电触点( 104 ),由n型材料形成并设置在基板上的下镜( 106 )衬底的上表面,具有设置在下反射镜部分上的多个量子阱的有源区( 108 ),由各向同性材料形成的上反射镜( 110 )和设置在有源区域上,等势层( 112 )设置在上镜部分上,第一上电触点( 120 )设置在等电层上,第二上层在距第一上部电触点特定距离( 124 ),第一隔离区( 126 )的等电位层上设置的电触点( 122 ) >)处理d在第一上触点下方并横穿等势层,上镜,有源区和下镜,第二隔离区( 128 )设置在第二上触点下方并横穿等势层,上反射镜,有源区域和下反射镜以及绝缘层( 114、116 ),该绝缘层介于上反射镜和等电位层之间,并适于在其间形成孔( 118 )的尺寸小于第一和第二上触点之间的特定距离。

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