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Versatile method and system for single mode VCSELs

机译:单模VCSEL的通用方法和系统

摘要

A system and method for providing a single mode VCSEL (vertical cavity surface emitting laser). A lower mirror is formed on a substrate. An active region including one or more quantum wells is formed over the lower mirror. The upper mirror formed over the active region can include multiple layers and may be formed to be have substantially isotropic conductivity. The layers in the upper mirror can include a lightly doped DBR layer, a heavily doped second layer including an isolation region, and a third heavily doped DBR layer. The active region may include conduction layers, which may be periodically doped, to improve conductivity and reduce free carrier absorption.
机译:提供单模VCSEL(垂直腔表面发射激光器)的系统和方法。下镜形成在基板上。在下反射镜上方形成包括一个或多个量子阱的有源区。形成在有源区上方的上镜可以包括多层,并且可以形成为具有基本上各向同性的导电性。上镜中的层可以包括轻掺杂DBR层,包括隔离区的重掺杂第二层和第三重掺杂DBR层。有源区可以包括可以周期性地掺杂的导电层,以提高导电性并减少自由载流子吸收。

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