首页>
外国专利>
Twist-N-Lock wafer area pressure ring and assembly for reducing particulate contaminant in a plasma processing chamber
Twist-N-Lock wafer area pressure ring and assembly for reducing particulate contaminant in a plasma processing chamber
展开▼
机译:Twist-N-Lock晶片面积压力环和组件,用于减少等离子体处理室内的颗粒污染物
展开▼
页面导航
摘要
著录项
相似文献
摘要
A confinement ring coupling arrangement for coupling, in a plasma processing chamber, a confinement ring to a plunger. The plunger is configured to move the confinement ring to deploy and stow the confinement ring to facilitate processing of a substrate within the plasma processing chamber. The confinement ring coupling arrangement includes a hanger adapter having a locking head, the hanger adapter being configured to be coupled with the plunger. The confinement ring coupling arrangement further includes a hanging bore disposed in the confinement ring and configured to receive the locking head and to secure the locking head within the hanging bore during stowing and deployment of the confinement ring, wherein a diameter of the locking head is sufficiently smaller than a cross-section dimension of the hanging bore to prevent a sidewall of the locking head from scraping against a sidewall of the hanging bore during the stowing and deployment of the confinement ring.
展开▼