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Apparatus and method for self-calibration of mass flow controller
Apparatus and method for self-calibration of mass flow controller
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机译:用于质量流量控制器的自校准的设备和方法
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摘要
A mass flow controller includes a mass flow sensor and a calibrator configured to perform a self-calibration on the mass flow controller. The calibrator generates flow measurements that are used as “standards” and flow measurements from the mass flow sensor are correlated to flow measurements from the calibrator.
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