Self-calibration mechanism of the flow sensor, self-calibration method, a program for self-calibration mechanism, and a mass flow controller

摘要

PROBLEM TO BE SOLVED: To provide a self-calibration mechanism and a self-calibration method capable of performing self-calibration by using a value obtained from a flow rate sensor arranged on a flow channel without separately installing a flow rate sensor to be a reference.;SOLUTION: The self-calibration mechanism includes: a valve totally enclosing section 7; a calibration volume calculation section 5 for calculating calibration volume based on an integrated value of a flow rate outputted from the flow rate sensor in a fluid parameter change section in which a flow rate of fluid flowing in the flow channel is changed with the lapse of time when valves 2, 21 are maintained at a totally enclosed state or the valves 2, 21 are changed from the totally enclosed state to an opened state; and a calibration section 6 for calculating a calibration coefficient for self-calibrating the flow rate on the basis of the calculated calibration volume and previously determined reference volume.;COPYRIGHT: (C)2014,JPO&INPIT