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End effectors and methods for manufacturing end effectors with contact elements to condition polishing pads used in polishing micro-device workpieces
End effectors and methods for manufacturing end effectors with contact elements to condition polishing pads used in polishing micro-device workpieces
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机译:末端执行器和制造带有接触元件的末端执行器的方法,以调节用于抛光微型设备工件的抛光垫
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摘要
End effectors, apparatuses including end effectors for conditioning planarizing pads, and methods for manufacturing end effectors with contact elements to condition planarizing pads used in polishing micro-device workpieces are disclosed herein. In one embodiment, an end effector includes a member having a first surface and a plurality of generally uniformly shaped contact elements attached to the first surface. The uniformly shaped contact elements project generally transversely from the first surface. In a further aspect of this embodiment, the uniformly shaped contact elements can be conical, frusto-conical, cylindrical, or other suitable configurations. The contact elements can also have a wear-resistant, carbon-like-diamond, silicon, and/or silicon carbide layer. Furthermore, the contact elements can have generally rounded tips.
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