METHOD FOR THE ETCHING OF PERMEABLE MEMBRANES MADE FROM SEMICONDUCTOR MATERIALS USING MACRO- AND MESO-PORE ETCHING

摘要

The invention relates to a method for the production of permeable membranes made from semiconductor materials, by electrochemical etching of macro-pores on a plane side of an essentially planar semiconductor, whereby mesopores are etched on the plane side of the semiconductor opposing the macropores.