XENON INSPECTION METHOD GLASS SUBSTRATE FOR PREVENTING DEFECTS BY EASILY INSPECTING LARGE GLASS SUBSTRATE

摘要

PURPOSE: A xenon inspection method is provide to increase the productivity by reducing the inspecting time and the manpower by simultaneously inspecting many glass substrate, to reduce the cost for securing an installation space by minimizing the area inside a clean room and to prevent the defects of a handling by easily inspecting a large glass substrate. CONSTITUTION: Plural glass substrates are loaded in a cassette by vertically separating each other. The cassette is located on the lower part of a beam movement passage of a xenon light(S10). The glass substrates are fixed on the beam movement passage of the xenon light by separating from the cassette while maintaining the installed status in the cassette(S20). Beam is irradiated from the xenon light to the glass substrates(S30). Defective images in images to be projected on a screen by the beam to be passed through the glass substrates are checked(S40). When the defective image in the projected images on the screen exists, a defective glass substrate is inspected by moving the glass substrates one by one(S50). The glass substrates are loaded in the cassette when the defective images do not exists or the glass substrate having the defects is decided.