MANUFACTURE METHOD OF NANOTUBES BY ATOMIC LAYER DEPOSITION USING INORGANIC MATERIALS ON NANO-TEMPLATE

摘要

PURPOSE: Provided is a method for manufacturing nanotubes applied to nano-bio materials by depositing inorganic materials(metal, oxide) on a mold, nano-template with many nanosize pores, and then removing the nano-template. CONSTITUTION: The nanotubes are manufactured by the following steps of: preparing a nano-template(10) such as anodized aluminum oxide thin film, forming many pores(15) with a 1-200nm size and a 0.2-20micrometer length (A); depositing inorganic materials such as ZrO2 or TiO2, selected from metals, oxides, sulfides and nitrides on the nano-template by an atomic layer deposition method (B); removing the nano template by etching or thermal decomposition, wherein, in case of etching, the resultant nanaotubes(50) are obtained by soaking the template in etchants(C1) and filtering or dropping etchants on the template by spin coater(C2).