CHEMICAL SUPPLY SYSTEM OF SEMICONDUCTOR DEVICE FABRICATING APPARATUS TO SUPPLY CHEMICALS TO CHEMICAL BUFFER IN REAL TIME

摘要

Purpose: a kind of chemical supply system of the semiconductor device of manufacturing device is provided to supplying chemical product to a chemical buffer in real time and effectively operates equipment, by the remaining volume for monitoring chemicals with one bottle. Construction: chemicals is refrigerated in a chemical reservoir (50,60). Chemically the chemicals of reservoir transfer is waited a predetermined space for the time in a chemical buffer (54,64) at room temperature. One supply main bottle (70) the storage chemicals that chemically buffer shifts simultaneously provides chemicals to a fabricating process. When the remaining chemicals being stored in supply main bottle reaches a reference level, chemically reservoir to chemical buffer is provided chemicals.