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Liquid chemical supply apparatus for supplying liquid chemical onto substrate, and semiconductor device fabrication method using liquid chemical supply apparatus
Liquid chemical supply apparatus for supplying liquid chemical onto substrate, and semiconductor device fabrication method using liquid chemical supply apparatus
A liquid chemical supply apparatus includes a storage unit, addition unit, and nozzle unit. The storage unit stores a liquid chemical. The addition unit adds, to the liquid chemical supplied from the storage unit, a modifier in an amount corresponding to the degree of deterioration of the liquid chemical. The nozzle unit supplies, onto a substrate, the liquid chemical to which the modifier is added.
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