ORGANIC VERTICAL CAVITY LASER ARRAY DEVICE WITH ETCHED REGION IN DIELECTRIC STACK, ESPECIALLY FORMING TWO-DIMENSIONAL ORGANIC LASER ARRAY DEVICES USING MICRON-SIZED LASER PIXELS

摘要

PURPOSE: A method for fabricating an organic vertical cavity laser array device with an etched region in a dielectric stack is provided to permit laser emission from a two-dimensional array of micron-sized organic laser pixels. CONSTITUTION: A substrate(110) is provided. A first part(120) of a bottom dielectric stack reflective to light over a predetermined range of wavelengths is provided. The first part is disposed on the substrate. An etched region is formed in the top surface of the first part of the bottom dielectric stack to define an array of separated laser pixels which have higher reflectance than the interpixel regions for the array to emit laser light. A second part(125) of the bottom dielectric stack is formed on the etched first part. An active region(130) is formed on the second part of the bottom dielectric stack for producing laser light. A top dielectric stack is formed on the active region. The top dielectric stack is separated from the bottom dielectric stack and is reflective to light over a predetermined range of wavelengths.