JIG FOR MOUNTING OUTER TUBE AND OUTER TUBE MOUNTING APPARATUS INCLUDING THE SAME TO REACTIVATE DEPOSITION SYSTEM WITHIN SHORT INTERVAL OF TIME AND IMPROVE PRODUCTIVITY

摘要

Purpose: the outer tube mounting apparatus including an outer tube installation tool is arranged to bring back to life a deposition system and be increased productivity within the short interval of time, by shortening a period for a stove-type deposition system preventative maintenance. Construction: the flange connection of an outer tube is loaded a cap base (52). The friction for reducing fixture (54) is placed on the top edge of cap base. The surface for reducing the friction of fixture is made of a kind of material, has the coefficient of friction lower than cap base. One driving device vertically shifts cap base.