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STRUCTURE OF CMOS TRANSISTOR FOR PREVENTING SHORT CHANNEL EFFECT BY ADJUSTING LENGTH OF CHANNEL AND FABRICATING METHOD THEREOF
STRUCTURE OF CMOS TRANSISTOR FOR PREVENTING SHORT CHANNEL EFFECT BY ADJUSTING LENGTH OF CHANNEL AND FABRICATING METHOD THEREOF
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机译:调整通道长度防止短通道效应的CMOS晶体管结构及其制造方法
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摘要
PURPOSE: A structure of a CMOS transistor and a fabricating method thereof are provided to prevent a short channel effect by adjusting a length of a channel according to a depth of a trench. CONSTITUTION: First and second conductive wells(114,116) are formed within a semiconductor substrate having a trench etched from a surface thereof. A well division layer(112a) is formed under a trench bottom between the first and the second conductive wells. A second conductive junction layer is formed vertically to the trench bottom and a surface of the first conductive well. A first conductive junction layer is formed vertically to the trench bottom and a surface of the second conductive well. A gate electrode(124) is formed by burying an insulating layer into the trench of the first and the second conductive wells.
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