首页> 外国专利> SEMICONDUCTOR DEVICE HAVING HIGH DEGREE OF INTEGRATION BY INCREASING PHOTO PROCESS MARGIN, METHOD OF FABRICATING THE SAME FOR INCREASING PRODUCTIVITY AND METHOD OF FABRICATING THE SAME

SEMICONDUCTOR DEVICE HAVING HIGH DEGREE OF INTEGRATION BY INCREASING PHOTO PROCESS MARGIN, METHOD OF FABRICATING THE SAME FOR INCREASING PRODUCTIVITY AND METHOD OF FABRICATING THE SAME

机译:通过增加光程保证金来具有高度集成度的半导体装置,一种用于提高生产率的制造方法及其制造方法

摘要

PURPOSE: A semiconductor device, a fabricating method of the same, an SRAM device, and a method of fabricating the same are provided to secure a high degree of integration by increasing a photo process margin. CONSTITUTION: A P-type doping region and an N-type doping region are formed within a unit cell region of a semiconductor substrate. A plurality of active patterns(102) having a first pitch are arranged in the P-type doping region and the N-type doping region. A plurality of gate patterns having a second pitch are arranged vertically to the active patterns. The first and the second pitches are formed with same size. A length of a first side of the unit cell region corresponds to integer times of the first pitch.
机译:目的:提供一种半导体器件,其制造方法,SRAM器件及其制造方法,以通过增加光处理裕度来确保高度集成。构成:在半导体衬底的晶胞区域内形成P型掺杂区和N型掺杂区。具有第一节距的多个有源图案(102)布置在P型掺杂区和N型掺杂区中。具有第二节距的多个栅极图案垂直于有源图案布置。第一节距和第二节距形成为相同的尺寸。单位单元区域的第一侧的长度对应于第一间距的整数倍。

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