首页> 外国专利> METHOD FOR MANUFACTURING ELECTROSTATIC ATTRACTION TYPE LIQUID DISCHARGE HEAD, METHOD FOR MANUFACTURING NOZZLE PLATE, METHOD FOR DRIVING ELECTROSTATIC ATTRACTION TYPE LIQUID DISCHARGE HEAD, ELECTROSTATIC ATTRACTION TYPE LIQUID DISCHARGING APPARATUS, AND LIQUID DISCHARGING APPARATUS

METHOD FOR MANUFACTURING ELECTROSTATIC ATTRACTION TYPE LIQUID DISCHARGE HEAD, METHOD FOR MANUFACTURING NOZZLE PLATE, METHOD FOR DRIVING ELECTROSTATIC ATTRACTION TYPE LIQUID DISCHARGE HEAD, ELECTROSTATIC ATTRACTION TYPE LIQUID DISCHARGING APPARATUS, AND LIQUID DISCHARGING APPARATUS

机译:静电吸引式液体排放头的制造方法,喷嘴板的制造方法,静电吸引式液体排放头的驱动方法,静电吸引式液体排放装置和液体排放装置

摘要

A plurality of electrodes (142) are formed on a substrate (141) through a film-forming process, a photolithography process and an etching process. Then, a resist layer (143b) is so formed over the substrate (141) as to cover the entire bodies of the electrodes (142). By exposing and developing the resist layer (143b), the resist layer (143b) is formed into nozzles (103) which stand on the substrate (141), correspond to the respective electrodes (142) and have very small diameters. A flow passage (145) is also formed within each nozzle (103).
机译:通过成膜工艺,光刻工艺和蚀刻工艺在基板(141)上形成多个电极(142)。然后,在基板141上形成抗蚀剂层143b,以覆盖电极142的整体。通过对抗蚀剂层143b进行曝光和显影,将抗蚀剂层143b形成为立设在基板141上,与各电极142相对应且直径非常小的喷嘴103。在每个喷嘴(103)内还形成有流道(145)。

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