METHOD FOR MANUFACTURING ELECTROSTATIC ATTRACTION TYPE LIQUID DISCHARGE HEAD, METHOD FOR MANUFACTURING NOZZLE PLATE, METHOD FOR DRIVING ELECTROSTATIC ATTRACTION TYPE LIQUID DISCHARGE HEAD, ELECTROSTATIC ATTRACTION TYPE LIQUID DISCHARGING APPARATUS, AND LIQUID DISCHARGING APPARATUS

摘要

first film-forming step, the photolithography step and the etching step through the substrate 141, a plurality of electrodes on the (142 , 142, ...) are formed. Then, electrodes (142, 142, ...) so as to cover the entire form the resist layer (143b) on the substrate 141, exposing a resist layer (143b) by developing, the resist layer (143b) of each electrode ( at the same time it is corresponding to 142) and to form the nozzle 103 of the second minute diameters erected with respect to the substrate 141, to form a nozzle within the flow path 145 in the respective nozzle (103).