SYSTEM FOR DETECTING LOADING CONDITIONS OF SEMICONDUCTOR WAFERS IN WAFER CARRIER

摘要

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a loading state detection system of a semiconductor wafer for detecting misalignment of a semiconductor wafer loaded on a wafer carrier, and includes wafer detection means for detecting whether a semiconductor wafer is inserted in each wafer slot. And a controller for receiving a predetermined electric signal from a wafer carrier and the wafer detecting means and determining whether a semiconductor wafer is present.;Accordingly, it is possible to automatically know whether the semiconductor wafers are aligned and stacked in the wafer carrier, thereby preventing damage to the semiconductor wafers caused by misalignment of the semiconductor wafers and thus improving the productivity of the semiconductor manufacturing process.