Defect test method and apparatus for gray-tone mask, and defect test method and apparatus for photo mask

摘要

The present invention provides a method capable of performing a transmission assurance in gray tonbu of the gray-tone mask defect inspection and defect inspection apparatus. Gray tone with the present invention, the light-shielding portion, the gray tone as to adjust the transmission portion and the transmission amount region to reduce the light transmission amount which passes through the zone for the purpose of selectively changing the thickness of which the photoresist exposed through the area parts as a defect inspection method for a mask, to obtain the transmission signal in the gray tonbu; And a check step on the basis of the defect threshold been set with respect to the transmission signal, the gray tonbu has a step of detecting a fault the gray-tone portion; Including inspection is a defect in the gray tone mask.