A vacuum arc - of vaporization, vacuum arc - evaporation system and the rotary cutter tool

摘要

A vacuum arc coating process that can form a hard coating layer excellent in both bonding quality with the substrate and surface roughness, a coating machine for this process, and a revolving cutting tool produced by this process. Vacuum chamber 1 is provided with subchamber 3 that is less evacuatable than coating chamber 2. Arcing-type evaporation source 4 is placed in subchamber 3. A gas such as nitrogen gas is introduced into subchamber 3 from gas-introducing portion 6 when substrate 10 is cleaned before the deposition, so that the gas pressure is kept higher in subchamber 3 than in the vicinity of substrate 10. This condition suppresses the generation of molten particles when the cathode (the evaporating material) of arc evaporation source 4 is melted and ionized, without reducing the sputtering effect. A revolving cutting tool thus obtained has a small magnitude of surface roughness.