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Thin film of silicon dioxide, silicon dioxide - titanium dioxide - a composite film and method for their preparation

机译:二氧化硅薄膜,二氧化硅-二氧化钛-复合薄膜及其制备方法

摘要

A process for producing a thin silicon-dioxide film, which is fixed on a substrate surface is applied, comprising(1) the immersion of the substrate in a solution, which consists of a silicon alkoxide, alcohol, water and an alkali is composed;(2), the production of a silica colloid low density with a diameter of 1 to 30 nm in the solution by hydrolysis of the silicon alkoxide in the alcoholic solvent;(3) the form of a uniform, thin silicon-dioxide film having a predetermined thickness on the substrate in the solution by deposition and dehydro poly condensation of these materials on the substrate; and(4) the holding of the reaction solution in a dynamic state in the above described film formation steps.
机译:采用固定在基板表面上的二氧化硅薄膜的制造方法,其包括:(1)将基板浸入由烷氧基硅,醇,水和碱组成的溶液中; (2)通过在醇溶剂中水解烷氧基硅,在溶液中生产直径为1至30nm的低密度二氧化硅胶体;(3)均匀,薄的二氧化硅膜的形式,其具有通过将这些材料在基板上沉积和脱氢缩合,在溶液中的基板上形成预定厚度; (4)在上述成膜步骤中使反应溶液保持动态状态。

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