ANALYSIS METHOD OF ENERGY LOSS SPECTROSCOPIC DEVICE, AND TRANSMISSION ELECTRON MICROSCOPE EQUIPPED WITH THE ENERGY LOSS SPECTROSCOPIC DEVICE

摘要

PROBLEM TO BE SOLVED: To enhance processing speed in an analysis method of an energy loss spectroscopic device and a transmission electron microscope, equipped with the energy loss spectroscopic device.;SOLUTION: The energy loss spectroscopic device is constituted of an image recording means 10 for recording a plurality of spectra as a single photoelectric conversion element image and an image processing means 12 for collectively reading the image from the image recording means 10 and subsequently performing the position converting processing of a pixel for dividing the image into a plurality of spectra. As a result, the processing speed of the energy loss spectroscopic device can be enhanced.;COPYRIGHT: (C)2007,JPO&INPIT