LIFE DECISION METHOD FOR ULTRAVIOLET LIGHT SOURCE, ULTRAVIOLET LIGHT SOURCE DEVICE, AND ULTRAVIOLET IRRADIATION DEVICE

摘要

PROBLEM TO BE SOLVED: To decide the life of an ultraviolet light source accurately without being affected by a change in the absolute value of the output of an ultraviolet sensor in an ultraviolet light source applying ultraviolet rays through a transmission member which allows ultraviolet rays to pass therethrough, to prevent situations which reduce product yield such as a loss of a target product due to a change in the output of the ultraviolet sensor in the middle of manufacturing the target product by an ultraviolet light source device or an ultraviolet irradiation device adopting the ultraviolet light source, and to prevent situations which require the maintenance of the ultraviolet light source in the middle of manufacturing the target product.;SOLUTION: The life of the ultraviolet light source 1 is decided from a temporal change in the spectral shape of the ultraviolet rays 1a passed through the transmission member 4.;COPYRIGHT: (C)2007,JPO&INPIT