PROBLEM TO BE SOLVED: To provide a braking device for a linear motor and a positioning method for a movable part of the linear motor for positioning the movable part with high precision and positively preventing positional deviation of the positioned movable part.;SOLUTION: When each magnetic flux generated from coils 36a, 36b passes through the inside of a plate spring 46, electromagnetic force caused by each magnetic flux is generated in the plate spring 46, a screw 48, and a magnetic flux passing-through member 52, and a brake pad 50 leaves a slide table 32 by action of electromagnetic force resisting resilient force of the plate spring 46. Consequently, the movable part 20 can be displaced relative to a fixed part 16. When occurrence of each magnetic flux from the coils 36a, 36b stops, the brake pad 50 presses the slide table 32 by action of resilient force of the plate spring 46 due to extinction of electromagnetic force. As a result, the movable part 20 is positioned and fixed relative to the fixed part 16.;COPYRIGHT: (C)2007,JPO&INPIT
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