SUBSTRATE-INSPECTING APPARATUS AND PARAMETER-SETTING METHOD AND PARAMETER-SETTING APPARATUS OF THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a technology for automatically generating parameters used for a substrate-inspecting apparatus.;SOLUTION: A parameter-setting apparatus considers colors of pixels in a target image as target points, considers the colors of pixels in an excluded image as exclusion points, and maps them to a color space (a color histogram). A color range for dividing the color space and maximizing a difference (a sum of degrees) between the number of the target points and the number of the exclusion points included in them, is found. The found color range is set as a color condition (a color parameter) used for a substrate inspection. Accordingly, the color condition which is one of the inspection parameters is automatically generated.;COPYRIGHT: (C)2006,JPO&NCIPI