NON-DESTRUCTIVE INSPECTION DEVICE DUE TO MOVEMENT OF SENSOR AND NON-DESTRUCTIVE INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a non-destructive inspection method using an ultrahigh sensitivity magnetic sensor capable of sensing weak magnetism of a nano-Tesla order such as a semiconducting quantum interference device (SQUID), a flux gate type sensor (FG sensor), a magnetic impedance sensor (MI sensor) or the like to move the sensor itself on the surface of a specimen and performing non-destructive inspection at a high speed by continuously detecting the magnetism of a large-scaled specimen such as an airplane, a power plant, a bridge, a multistory building and the like to obtain the magnetism distribution of the speciemen, and the inspection device therefor.;SOLUTION: The non-destructive inspection device has the ultrahigh sensitivity magnetic sensor, a sensor moving mechanism for moving at least the ultrahigh sensitivity magnetic sensor, a sensor moving control part for controlling the sensor moving mechanism, a signal generating part for generating the signal applied to the specimen, the magnetism measuring part connected to the output side of the ultrahigh sensitivity magnetism sensor, a phase comparing part for comparing the signal of the signal generating part and the signal of the magnetism measuring part and a timing forming part functioning according to the output of the phase comparing part. The ultrahigh sensitivity magnetism sensor is moved to perform measurement.;COPYRIGHT: (C)2006,JPO&NCIPI