PROBLEM TO BE SOLVED: To provide a microscopic inspection apparatus capable of successively and efficiently inspecting a number of samples.;SOLUTION: The microscopic inspection apparatus 100 is equipped with a cassette 102 which can house a plurality of sheets of samples 101, an elevator to vertically move the cassette 102, a microscope 132 to enlarge and observe a sample 101, an XY stage 105 to appropriately place the sample 101 in an observation position, and a carrying device 104 to carry the sample 101 between the cassette 102 and the XY stage 105. The carrying device 104 is equipped with a holding part to hold a sample 101, a horizontal moving mechanism to horizontally move the holding part, and a lifting mechanism to move up and down the holding part, and a rotating mechanism to rotate the holding part. The XY stage 105 has an upper table 119 which can move in the X direction, and a sample 101 is mounted on the upper table 119. The upper table 119 has an opening 128 where a fork portion 117 of the carrying device 104 passes up and down.;COPYRIGHT: (C)2006,JPO&NCIPI
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