ELECTRONIC MICROSCOPIC METHOD AND ELECTRONIC MICROSCOPE USING THE SAME, AND BIOLOGICAL MATERIAL INSPECTION METHOD AND BIOLOGICAL INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a device in which a focusing and a movement amount are automatically rectified by using an image of an electronic microscope.;SOLUTION: The dislocation analysis method includes a process in which a phase difference image P' (k, l) between Fourier conversion images of image pairs S1 (n, m) and S2 (n, m) is calculated, and a gravity center position of a delta-peak appearing on an inverse Fourier conversion image of the above image is adopted. As a result, an analysis precision of a dislocation becomes within one pixel or less, and a focusing analysis precision is improved. Or, a number of pixels can be reduced to obtain the same analysis precision. An authenticity of an analysis result can be evaluated by an intensity of the delta-peak. Since a phase constituent is used, a variation of a background is hard to affect an operation. Thus, an unskilled operator can make the same rectification as a skilled operator thanks to the above improved function.;COPYRIGHT: (C)2007,JPO&INPIT