Separable device null large number of the overlap substrate in transport equipping

摘要

PROBLEM TO BE SOLVED: To certainly separate substrates one by one when the substrates adsorbed by a vacuum suction collet are doubly overlapped and adhered at the time of taking off the substrates stacked and stored in a magazine holder one by one from the one on the top stage by the vacuum suction collet. ;SOLUTION: A separation stage 4 is provided in a transfer route of a vacuum suction collet 3, thickness of substrates A, C vacuum sucked on the vacuum adsorptive collet 3 at a point of this separation stage is detected by thickness sensors 7a, 7b, and in cases where it is judged by them that they are doubly overlapped, the substrate C on the lower side is sucked on an upper surface of the separation stage 4 by a port 8 for vacuum suction, and only the substrate 4 on the upper side is lifted up by the vacuum suction collet 3.;COPYRIGHT: (C)1999,JPO