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How to create masks, masks for use in lithography, the lithographic apparatus, and device manufacturing method
How to create masks, masks for use in lithography, the lithographic apparatus, and device manufacturing method
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机译:如何制作掩模,用于光刻的掩模,光刻设备以及器件制造方法
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摘要
A reflective mask has a sub-resolution texture applied to absorbing areas to reduce the amount of power in the specular reflection. The texture may form a phase contrast grating or may be a diffuser. The same technique may be applied to the other absorbers in a lithographic apparatus.
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