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To store the crystal sheet production device and the crystal sheet
To store the crystal sheet production device and the crystal sheet
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机译:存储水晶片制造装置和水晶片
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摘要
PROBLEM TO BE SOLVED: To provide a method and an apparatus for manufacturing a crystal sheet improving a productivity of the crystal sheet having a uniform sheet thickness and a uniform surface coarseness and at the same time having a small heat loss within the main body of the apparatus.;SOLUTION: It is able to suppress heating power by preventing a heat loss and reducing the change of the temperature within the main body of the apparatus by arranging rotating bodies 2, each having a plurality of base members 8 disposed around the outer periphery of it, within a plurality of compartments 19-20 thermally insulated with insulating members 13, 14. It is also able to extremely improve productivity by eliminating factors of lowering efficiencies by performing the operations in the plurality of the compartments independently and in parallel and by separating the peeling operation, which has been the most disturbing matter of the productivity, from the main body of the apparatus. It is also able to manufacture a high quality crystal sheet by performing the sheet producing operation without influence of a shock accompanied with the peeling operation and without an irregularity of the melt surface.;COPYRIGHT: (C)2002,JPO
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