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To store the crystal sheet production device and the crystal sheet

机译:存储水晶片制造装置和水晶片

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for manufacturing a crystal sheet improving a productivity of the crystal sheet having a uniform sheet thickness and a uniform surface coarseness and at the same time having a small heat loss within the main body of the apparatus.;SOLUTION: It is able to suppress heating power by preventing a heat loss and reducing the change of the temperature within the main body of the apparatus by arranging rotating bodies 2, each having a plurality of base members 8 disposed around the outer periphery of it, within a plurality of compartments 19-20 thermally insulated with insulating members 13, 14. It is also able to extremely improve productivity by eliminating factors of lowering efficiencies by performing the operations in the plurality of the compartments independently and in parallel and by separating the peeling operation, which has been the most disturbing matter of the productivity, from the main body of the apparatus. It is also able to manufacture a high quality crystal sheet by performing the sheet producing operation without influence of a shock accompanied with the peeling operation and without an irregularity of the melt surface.;COPYRIGHT: (C)2002,JPO
机译:解决的问题:提供一种用于制造晶体片的方法和设备,该方法和设备提高了晶体片的生产率,该晶体片具有均匀的片厚和均匀的表面粗糙度并且同时在其主体内具有小的热损失。解决方案:解决方案:通过布置旋转体2来防止热量损失并减少设备主体内的温度变化,从而抑制发热量,每个旋转体2的外周均设有多个底座8其中,在通过绝缘构件13、14进行热绝缘的多个隔室19-20内,通过在多个隔室中独立地,并行地进行操作,消除了降低效率的因素,从而能够极大地提高生产率。将剥离操作从设备的主体中分离出来,剥离操作一直是生产率最令人困扰的问题。通过进行片材生产操作,也能够制造高质量的晶体片材,而不会受到伴随剥离操作的冲击的影响,并且熔体表面没有不规则性。;版权所有:(C)2002,JPO

著录项

  • 公开/公告号JP3754306B2

    专利类型

  • 公开/公告日2006-03-08

    原文格式PDF

  • 申请/专利权人 シャープ株式会社;

    申请/专利号JP20010044848

  • 发明设计人 山下 善二郎;矢野 光三郎;

    申请日2001-02-21

  • 分类号C01B33/02;B22D21/00;B22D23/04;B22D27/08;B22D29/00;B22D29/04;B22D45/00;H01L31/04;

  • 国家 JP

  • 入库时间 2022-08-21 21:48:45

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