Ultra-thin sample preparation for transmission electron microscopy

摘要

In accordance with the invention, there is a method of fabricating a material for transmission electron microscopy comprising removing a first portion from a material having a thickness of (d₁) to form a thinned material having a thickness of (d₂), contacting the thinned material to a sacrificial layer having a thickness of (s₁), and removing a second portion from the thinned material so the thinned material has a thickness of (d₃), wherein (d₃)(d₂).