Automated method of correcting aberrations in electron beam, method of visualizing aberrations, and automated aberration corrector

摘要

There is disclosed a method and apparatus for automatically correcting aberrations in an electron beam by the use of a computer. An axis deviation-correcting means for correcting deviation of the axis of the beam, a focusing means for correcting defocus of the beam, a chromatic aberration-correcting means for correcting chromatic aberration in the beam, and an aperture aberration-correcting means for correcting aperture aberration in the beam are stored in the computer.