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Semiconductor device including a TFT having large-grain polycrystalline active layer, LCD employing the same and method of fabricating them
Semiconductor device including a TFT having large-grain polycrystalline active layer, LCD employing the same and method of fabricating them
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机译:包括具有大晶粒多晶有源层的TFT的半导体器件,采用该TFT的LCD及其制造方法
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摘要
A display device includes a pixel region having a plurality of pixels and a peripheral circuit region disposed at a periphery of the pixel region for driving the pixels. The peripheral circuit region includes transistors fabricated from polycrystalline semiconductor and having a semiconductor crystalline grain of a first kind in a channel region thereof, wherein a grain size of the semiconductor crystalline grain of the first kind is at least 3 μm. The pixel region includes transistors fabricated from polycrystalline semiconductor and having a semiconductor crystalline grain of a second kind in a channel region thereof, wherein a grain size of the semiconductor crystalline grain of the second kind is at least 0.05 μm.
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