process for improving the adherence of thin films deposited by the pecvd process in pet packaging and resulting packaging

摘要

"Process for Improving the Adhesion of Thin Films Deposited by the PECVD Process in PET Packaging and Resulting Packaging". A process for improving the adhesion of thin films deposited by the PECVD process in PET packaging is described which comprises applying to that package an oxygen plasma treatment and subsequent application of PECVD film. Plasma treatment aims to promote the incorporation of functional groups, increase surface roughness and promote the anchorage of the film to be deposited, whereby the adhesion between the packaging and the carbon film to be deposited will be improved. Hydrogenated amorphous carbon plasma is produced with acetylenolargonium gases using a system consisting of a vacuum chamber or reactor (1) provided with electrodes (2a, 2b) connected to a source (6) of voltage for plasma generation, the luminescent discharge plasma being produced in the chamber (1) and acting on the substrate (3), a pumping system (5) for the production of vacuum in the chamber (1), a gas supply system (4) to the chamber, the plasma being generated by the application of a continuous electric field between the electrodes (2a, 2b) in the low pressure precursor gases. PET packaging with improved carbon film adhesion is also described.