首页> 外国专利> Process for improving the adhesion of thin films deposited by the pecvd process in virgin, recycled or combined pet packaging in any proportion and pet packaging.

Process for improving the adhesion of thin films deposited by the pecvd process in virgin, recycled or combined pet packaging in any proportion and pet packaging.

机译:改进通过pecvd工艺沉积的薄膜在原始,可循环使用或组合的宠物包装中以任何比例和宠物包装的附着力的方法。

摘要

Process for improving the adhesion of thin films deposited by the process PECVD PET packaging and packaging from. It is described a process for improving the adhesion of thin films deposited by the process PECVD PET packaging which comprises applying to said package with oxygen plasma treatment and postPrevious application of film of PECVD.Treatment with plasma, aims to promote the incorporation of functional groups, increase the surface roughness and promote the binding of film to be deposited.So it will be improved the adhesion between the package and the film of carbon to be deposited.The plasma hydrogenated amorphous carbon is produced with acetilenolargu00f3nio gases using a system that consists of a vacuum chamber or reactor (1) provided with electrodes (2a...2b) connected to a source (6) of electrical voltage for generating the plasma, glow discharge plasma is produced in the chamber (1) and acting on the substrate (3),A pumping system (5) for the production of a vacuum in the chamber (1), a gas supply system (4) to the chamber.The plasma being generated by the application of an electric field continuously between the electrodes (2a, 2b) in the precursor gases at low pressure.The PET packaging with improved adhesion to the film of carbon is also described.
机译:改善薄膜附着力的方法是通过PECVD和PET封装的方法包装而成的。描述了一种改善通过PECVD PET包装工艺沉积的薄膜的粘附性的方法,该方法包括通过氧等离子体处理将PECVD薄膜应用于所述包装,以及在先前的PECVD薄膜应用之后进行等离子体处理,旨在促进官能团的引入。 ,增加了表面粗糙度并促进了要沉积的薄膜的结合。因此,将改善包装与要沉积的碳薄膜之间的附着力。使用乙腈体系的等离子气体生产等离子体氢化无定形碳由真空室或反应器(1)组成,真空室或反应器(1)设有电极(2a ... 2b),电极(2a ... 2b)连接到用于产生等离子体的电压源(6),辉光放电等离子体在室(1)中产生并作用于基板(3),用于在腔室(1)中产生真空的抽气系统(5),向腔室的气体供应系统(4)。通过施加电产生等离子体在低压下前驱气体中的电极(2a,2b)之间连续地产生电场。还描述了对碳膜具有改善粘附性的PET包装。

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