IMAGE SENSOR WITH ENLARGED OUTWARD APPEARANCE OF MICROLENS AND METHOD FOR FABRICATION THEREOF

摘要

An image sensor with an enlarged outward appearance of a microlens and a method for fabricating the same are provided. The image sensor includes: a plurality of microlenses formed on a semiconductor substrate with a certain spacing distance; and a protection layer formed over the microlenses, wherein the protection layer includes a first oxide layer which is formed by a plasma enhanced chemical vapor deposition (PECVD) method and a second oxide layer which is formed by a spin on glass (SOG) method over the first oxide layer to maintain sufficient step coverage over chasms between the microlenses.