PRESSURE GRADIENT CVI/CVD APPARATUS AND PROCESS

摘要

PROBLEM TO BE SOLVED: To provide a CVI/CVD process capable of quickly and uniformly densifying porous structures while minimizing cost and complexity, and to provide an apparatus for performing the process.;SOLUTION: A CVI/CVD process comprises the steps of: partially densifying a porous structure within a CVI/CVD furnace by depositing a first matrix within the porous structure with a pressure gradient CVI/CVD process in which a first portion of the porous structure 22 is subjected to greater pressure than a second portion of the porous structure and the first portion has a greater bulk density gain than the second portion; and, subsequently densifying the porous structure by depositing a second matrix within the porous structure with at least one additional densification process in which the second portion has a greater bulk density gain than the first portion.;COPYRIGHT: (C)2007,JPO&INPIT