PLASMA PROCESSOR, AND FLOW DIVIDING RATIO TESTING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a tester for objectively testing a flow dividing ratio to a process gas flow divider used for a plasma processor.;SOLUTION: The plasma processor comprises: a treatment room in which a sample treated by a plasma is installed, a piping system feeding a process gas to the treatment room, a controller controlling the piping system, and a display monitor connected to the controller. The piping system is equipped with a gas feeding source feeding the process gas; a branch branching a gas line from the gas feeding source to plural lines; a flow rate measuring instrument provided at each gas line after branching; and a control valve for controlling a flow rate of the gas line which is provided at each gas line after branching, and is provided at a down stream of the flow rate measuring instrument. The controller performs in all gas lines such a measuring process as to measure a flow rate by opening the control valve of one gas line and closing the control valves of other gas lines to obtain, and to compare a gas flow rate of each gas line.;COPYRIGHT: (C)2007,JPO&INPIT